Contamination Growth
As a rule of thumb, one monolayer (~1015 atoms/cm2
or ~3 Å) of material can be captured by a surface every second at
10-6 Torr. The amount which adheres to the surface depends upon the
'sticking coeficient'. A value of 1 means that each atom that arrives at the
surface will remain. The coeficient will vary as the surface changes and
will eventually arrive at a steady state and the contaminant layer will not
increase further. The MBE and SPM systems operate with background pressures
in the 10-10 range or better. At these pressures, the main
contaminants which remain in the system are hydrogen and carbon monoxide.
To complete the perspective, 1 atmosphere of pressure is 760 Torr. There is
then 13 orders of magnitude difference in pressure between the SPM chamber and
and air. A single monolayer of contaminants will arrive at the surface of a
sample in about 3 hours.
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