FIG. 5 Optical Microscope and Atomic Force Microscope (AFM) pictures of the BaF₂ layers grown at 320^oC with and without rapid thermal anneals (RTA) and thermal soaks.
The left side shows optical Nomarski images of the BaF₂ layers grown at 320^oC. The magnification is 100 x Object. (a) is a layer grown at 320^oC. (b) is a layer grown at 320^oC followed by an in situ RTA of 1100^oC for 20 seconds. (c) is a layer grown at 320^oC with an in situ RTA of 1100^oC for 30 seconds followed by a thermal soak at 700^oC for 45? seconds. The right hand side shows 5 mm by 5 mm AFM images of the same samples. (a) and (b) have color scales ranging from 0 (black) to 12 nm (white). (c) has a color scale ranging from 0 to 30 nm.