FIG. 3 BaF2 layer characteristics versus growth temperature.
The left axis shows large area and small area RMS roughness. Small area roughness is used to refer to the roughness of the underlying BaF2 layer away from any particulates which can be seen on AFM and optical microscope pictures. Large area roughness refers to the roughness of the layer including the particulates. The right axis shows the X-ray peak widths of the BaF2 layers at the different growth temperatures.